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[International Conference] Study on the Discharge Modes in a Microplasma Devices with the Auxiliary Electrode
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S.H.Kim , J.H.Mun , K.C.Choi
IEEE International Conference On Plasma Science, June , 2007
Published
vol , no , pp 190
Abstract
Study on the Discharge Modes in a Microplasma Devices with the Auxiliary Electrode
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